JPS5877447A - 表面研摩法とその装置 - Google Patents
表面研摩法とその装置Info
- Publication number
- JPS5877447A JPS5877447A JP56172835A JP17283581A JPS5877447A JP S5877447 A JPS5877447 A JP S5877447A JP 56172835 A JP56172835 A JP 56172835A JP 17283581 A JP17283581 A JP 17283581A JP S5877447 A JPS5877447 A JP S5877447A
- Authority
- JP
- Japan
- Prior art keywords
- polisher
- workpiece
- processing
- magnetic
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 8
- 230000005291 magnetic effect Effects 0.000 claims abstract description 60
- 238000005498 polishing Methods 0.000 claims abstract description 50
- 239000011553 magnetic fluid Substances 0.000 claims abstract description 37
- 239000007788 liquid Substances 0.000 claims abstract description 13
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 27
- 239000006061 abrasive grain Substances 0.000 claims description 21
- 239000012528 membrane Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000004907 flux Effects 0.000 abstract description 16
- 238000003825 pressing Methods 0.000 abstract description 4
- 230000005415 magnetization Effects 0.000 abstract 1
- 238000003754 machining Methods 0.000 description 10
- 230000003746 surface roughness Effects 0.000 description 9
- 229910001369 Brass Inorganic materials 0.000 description 6
- 239000010951 brass Substances 0.000 description 6
- 229910000906 Bronze Inorganic materials 0.000 description 4
- 239000010974 bronze Substances 0.000 description 4
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 230000004308 accommodation Effects 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 235000008733 Citrus aurantifolia Nutrition 0.000 description 1
- 235000011941 Tilia x europaea Nutrition 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000004571 lime Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000005298 paramagnetic effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56172835A JPS5877447A (ja) | 1981-10-30 | 1981-10-30 | 表面研摩法とその装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56172835A JPS5877447A (ja) | 1981-10-30 | 1981-10-30 | 表面研摩法とその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5877447A true JPS5877447A (ja) | 1983-05-10 |
| JPS6141702B2 JPS6141702B2 (en]) | 1986-09-17 |
Family
ID=15949218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56172835A Granted JPS5877447A (ja) | 1981-10-30 | 1981-10-30 | 表面研摩法とその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5877447A (en]) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60186368A (ja) * | 1984-03-02 | 1985-09-21 | Taihoo Kogyo Kk | 磁性流体による研摩方法 |
| JPS61244458A (ja) * | 1985-04-20 | 1986-10-30 | Ajikawa Tekko Kensetsu Kk | 管内面の研磨方法 |
| JPS61244456A (ja) * | 1985-04-20 | 1986-10-30 | Ajikawa Tekko Kensetsu Kk | 管内面の研磨方法 |
| JPS63212461A (ja) * | 1987-02-25 | 1988-09-05 | Mitsubishi Metal Corp | 非磁性金属管の内面研摩法 |
| JPH01216762A (ja) * | 1988-02-23 | 1989-08-30 | Toshiji Kurobe | 曲面研摩装置 |
| CN106425704A (zh) * | 2016-12-07 | 2017-02-22 | 深圳市智博高科光电装备有限公司 | 开放性磁场的磁流变抛光磨轮装置 |
| CN109648457A (zh) * | 2019-02-11 | 2019-04-19 | 辽宁科技大学 | 一种六自由度摆动的磁力研磨装置及磁力研磨方法 |
-
1981
- 1981-10-30 JP JP56172835A patent/JPS5877447A/ja active Granted
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60186368A (ja) * | 1984-03-02 | 1985-09-21 | Taihoo Kogyo Kk | 磁性流体による研摩方法 |
| JPS61244458A (ja) * | 1985-04-20 | 1986-10-30 | Ajikawa Tekko Kensetsu Kk | 管内面の研磨方法 |
| JPS61244456A (ja) * | 1985-04-20 | 1986-10-30 | Ajikawa Tekko Kensetsu Kk | 管内面の研磨方法 |
| JPS63212461A (ja) * | 1987-02-25 | 1988-09-05 | Mitsubishi Metal Corp | 非磁性金属管の内面研摩法 |
| JPH01216762A (ja) * | 1988-02-23 | 1989-08-30 | Toshiji Kurobe | 曲面研摩装置 |
| CN106425704A (zh) * | 2016-12-07 | 2017-02-22 | 深圳市智博高科光电装备有限公司 | 开放性磁场的磁流变抛光磨轮装置 |
| CN109648457A (zh) * | 2019-02-11 | 2019-04-19 | 辽宁科技大学 | 一种六自由度摆动的磁力研磨装置及磁力研磨方法 |
| CN109648457B (zh) * | 2019-02-11 | 2023-08-22 | 辽宁科技大学 | 一种六自由度摆动的磁力研磨装置及磁力研磨方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6141702B2 (en]) | 1986-09-17 |
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